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发明名称
Laser tracking interferometer
摘要
申请公布号
EP1750085(A3)
申请公布日期
2012.04.18
申请号
EP20060013532
申请日期
2006.06.29
申请人
MITUTOYO CORPORATION
发明人
YANAKA, SHINICHIROU;ABE, MAKOTO;HARA, SHINICHI;TAKETOMI, NAOYUKI
分类号
G01B9/02;G01B11/03;G01S17/66
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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