| 摘要 |
PURPOSE: A purification apparatus is provided to allow a treatment liquid sprayer to widely discharge a used coolant containing micro bubbles to the inside a liquid storage tank. CONSTITUTION: A purification apparatus comprises a liquid storage tank(10), bubble generators(11,21,22), and a supply unit(26). The bubble generators generate micro bubbles in a used treatment liquid(L) and discharge the used treatment liquid containing micro bubbles. The supply unit guides the discharged treatment liquid to the liquid storage tank and supplies the treatment liquid to the bottom of the liquid storage tank.
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