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发明名称
摘要
申请公布号
JP4918354(B2)
申请公布日期
2012.04.18
申请号
JP20060515377
申请日期
2004.06.28
申请人
发明人
分类号
H01L29/78;H01L21/8234;H01L21/8238;H01L27/088;H01L27/092;H01L29/10;H01L29/15
主分类号
H01L29/78
代理机构
代理人
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地址
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