| 摘要 |
<p>The invention concerns a polishing arrangement (1) with a tool holder (3), at which a polishing tool is arranged and that interacts with a workpiece holder (5), the workpiece holder (5) and the tool holder (3) being movable in relation to one another in a first direction and in a second direction differing from the first direction. It is endeavored to make at least a part of the polishing process reproducible and documentable. For this purpose, in a third direction (20) that is perpendicular to the first (9) and second (10, 12) directions, the tool holder (3) is made to be flexible.</p> |
