发明名称 (METH)ACRYLATE TYPE POLYMER AND PHOTOSENSITIVE RESIST COMPOSITION INCLUDING THE SAME
摘要 <p>PURPOSE: A (meth)acrylate-based polymer is provided not to generate scum because of excellent solubility to developer, to have excellent adhesion to a substrate, and to manufacture a resin film with excellent implant resistance. CONSTITUTION: A (meth)acrylate-based polymer comprises repeating units in chemical formula 1-3. In chemical formulas, R^1 comprises hydrogen or a methyl group, R^10 comprises a substituted or unsubstituted C3-20 cycloalkyl group, or a substituted or unsubstituted C2-20 heterocycloalkyl group, n is an integer of 0-3, R^2 comprises hydrogen or a methyl group, R^20 comprises a substituted or unsubstituted C3-20 cyclo alkyl group including an ester group, R^3 comprises hydrogen or a methyl group, and R^30 comprises t-butyl, triethylcarbyl, 1-methylcyclohexy, 1- ethylcyclopentyl, t-amyl, or acetal.</p>
申请公布号 KR20120036126(A) 申请公布日期 2012.04.17
申请号 KR20100097834 申请日期 2010.10.07
申请人 CHEIL INDUSTRIES INC. 发明人 KIM, TAE HO;YANG, YOUNG SOO;LEE, JUN HO;CHOI, SEUNG JIB;CHOI, SANG JUN
分类号 C08F20/10;C08F20/18;C08L33/04;G03F7/004 主分类号 C08F20/10
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