LINEAR MOTOR AND STAGE DEVICE

摘要

PURPOSE: A linear motor and a stage device are provided to prevent the degradation of a motor constant by suppressing mutual interference a driving magnetic field for an X axis by a first magnet row and a driving magnetic field for a Y axis by a second magnet row. CONSTITUTION: A linear motor(1) includes a field(2) comprising a stator and a mover comprising an armature(3). Two field yokes(4) face with each other in parallel through a yoke base(5). A first magnet row(6) and a second magnet row(7) are formed in the field yoke. A first armature coil faces the first magnet row. A second armature coil faces the second magnet row.