发明名称 Integrated memory arrays
摘要 Some embodiments include methods of forming memory arrays. A stack of semiconductor material plates may be patterned to subdivide the plates into pieces. Electrically conductive tiers may be formed along sidewall edges of the pieces. The pieces may then be patterned into an array of wires, with the array having vertical columns and horizontal rows. Individual wires may have first ends joining to the electrically conductive tiers, may have second ends in opposing relation to the first ends, and may have intermediate regions between the first and second ends. Gate material may be formed along the intermediate regions. Memory cell structures may be formed at the second ends of the wires. A plurality of vertically-extending electrical interconnects may be connected to the wires through the memory cell structures, with individual vertically-extending electrical interconnects being along individual columns of the array. Some embodiments include memory arrays incorporated into integrated circuitry.
申请公布号 US8158967(B2) 申请公布日期 2012.04.17
申请号 US20090624312 申请日期 2009.11.23
申请人 TANG SANH D.;FUCSKO JANOS;MICRON TECHNOLOGY, INC. 发明人 TANG SANH D.;FUCSKO JANOS
分类号 H01L47/00 主分类号 H01L47/00
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