APPARATUS WITH MULTIPLE HEATING SYSTEMS FOR IN-LINE THERMAL TREATMENT OF SUBSTRATES

摘要

PURPOSE: An apparatus which includes a multi-heating system for an inline heat treatment process of a substrate is provided to increase and maintain the temperature of a material to a predetermined temperature, thereby improving efficiency of a TF(Thin Film) module or a PV(Photo-Voltaic) solar cell. CONSTITUTION: A transport system transfers a material. A first heating system is arranged adjacent to the transport system. The first heating system supplies heat in order to increase the temperature of the material to a predetermined temperature. A second heating system is arranged on a downstream side of the first heating system. The second heating system supplies uniform heat to the material in order to maintain the predetermined temperature of the material.