发明名称 |
Apparatus for cathodic vacuum-arc coating deposition |
摘要 |
Apparatus for cathodic vacuum-arc coating deposition. The apparatus includes a mixing chamber, at least one input duct projecting from a first end wall of the mixing chamber, and an output duct projecting from a second end wall of the mixing chamber. Coupled with each input duct is a plasma source adapted to discharge an ion flow of a coating material into the mixing chamber, which is subsequently directed to the output duct. A first solenoidal coil disposed about a side wall of the mixing chamber creates a first magnetic field inside the mixing chamber for steering the ion flow. A second solenoidal coil is disposed adjacent to the first end wall and aligned substantially coaxially with the output duct. The second solenoidal coil creates a second magnetic field inside the mixing chamber for steering the first ion flow. The electrical currents flow through the first and second solenoidal coils in opposite solenoidal directions. |
申请公布号 |
US8157976(B2) |
申请公布日期 |
2012.04.17 |
申请号 |
US20070740592 |
申请日期 |
2007.04.26 |
申请人 |
DRUZ BORIS;AKSENOV IVAN I.;LUCHANINOV OLEXANDR A.;STRELNYTSKIY VOLODYMYR E.;VASYLYEV VOLODYMYR V.;ZARITSKIY ISAAK;SFERLAZZO PIERO;VEECO INSTRUMENTS, INC. |
发明人 |
DRUZ BORIS;AKSENOV IVAN I.;LUCHANINOV OLEXANDR A.;STRELNYTSKIY VOLODYMYR E.;VASYLYEV VOLODYMYR V.;ZARITSKIY ISAAK;SFERLAZZO PIERO |
分类号 |
C23C14/00;C23C16/00;H01L21/306 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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