PLASMA FACING COMPONENTS CLOSED TYPE NITROGEN GAS BAKING SYSTEM

摘要

PURPOSE: An apparatus for heating and cooling plasma facing components closed type nitrogen gas is provided to minimize the thermal energy loss of nitrogen by eliminating an inhibiting factor obstructing plasma formation. CONSTITUTION: A compressor(400) compresses and supplies a nitrogen gas circulating around PFC(Plasma Facing Components). A heater part(300) heats the nitrogen gas provided to the PFCs. A heat exchanger heat-exchanges the nitrogen gas to be below or over a preset temperature. A vacuum pump(200) forms an inside of a circulating flow path of the PFCs to be a vacuum state. A nitrogen gas circulation circuit controls thermal energy loss.