CAPACITANCE TYPE DIFFERENTIAL SENSOR MODULE AND INSPECTION APPARATUS OF DISPLAY PANEL USED THEREOF

摘要

PURPOSE: A capacitive differential sensor module and a display panel inspection apparatus using the same are provided to examine a cross short circuit by measuring differential voltage through a non-contact differential sensor and voltage through a non-contact sensor. CONSTITUTION: A capacitive differential sensor module(100) comprises a non-contact sensor(110) and a non-contact differential sensor(120). The non-contact sensor outputs voltage which is detected corresponding to a pattern electrode. The non-contact differential sensor outputs differential voltage of the pattern electrode by being arranged parallel to the non-contact sensor.