GRAPHENE INTERCONNECTION AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A graphene wiring line and a manufacturing method thereof are provided to reduce resistance of the wiring line by directly connecting an end part of a graphene sheet to a catalyst under-layer. CONSTITUTION: An insulating film(13) includes a wiring groove(30). A catalytic film(14) is formed within the wiring groove. The catalytic film fills a part of the wiring groove. A graphene layer(16) is formed on the catalytic film. The graphene layer comprises graphene sheets laminated in a vertical direction with respect to the bottom surface of the wiring groove.