| 摘要 |
PURPOSE: An apparatus for preventing wire disconnection is provided to suppress the increase of wire resistance by covering the inner surface of a void with a graphene layer of low resistance. CONSTITUTION: A first insulating layer(11) includes a first trench. A first wiring layer(15) is arranged within the first trench. The first wiring layer comprises copper. A concave part(16) is included within the copper of the first wiring layer. A first graphene sheet is formed on the inner surface of the concave part. |
