A SEMICONDUCTOR DEVICE AND A METHOD OF FORMING THE SAME

摘要

PURPOSE: A semiconductor device and a formation method thereof are provided to prevent an electrical short of a liner electrode and contact plugs by increasing the distance between the liner electrode and the contact plug. CONSTITUTION: A bulk electrode(135) is arranged within a trench. A liner electrode(125) is formed between the bulk electrode and the inner surface of the trench. The liner electrode includes a sidewall part. The sidewall part is arranged between sidewalls of the bulk electrode and the trench. A gate dielectric film(110) is arranged between the inner surface of the trench and the liner electrode.