| 摘要 |
PURPOSE: An apparatus for supplying organic matter, apparatus and method for depositing organic matter using the same are provided to form uniformly the thickness of the organic film on the entire area of materials by controlling flow of organic matters. CONSTITUTION: An apparatus for supplying organic matter includes a plurality of crucibles(110), a plurality of heaters(130), a cooling device(150), a diffusion pipe(170), a nozzle(190). One side of crucible is opened. The crucibles accept the organic compound. The crucibles are arranged in parallel. The organic compound is vaporized by heating each crucible. The partition(175) is installed inside the diffuser. Each organic compound vaporized from a plurality of crucibles is expanded to the independent diffusion space. The nozzle is opened to the matters. The nozzle improves the flow velocity of the organic compound.
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