发明名称 |
SUBSTRATE TRAY AND MODULE FOR DETACHING SUBSTRATE |
摘要 |
PURPOSE: A substrate tray and a substrate separation module are provided to prevent damage of a substrate by preventing residual pressure generated between the substrate and the tray. CONSTITUTION: A substrate separation part(130) is expanded from one surface of a stage(140). The substrate separation part separates a substrate from a tray by being inserted into a penetration hole. The substrate separation part includes a pneumatic chamber. A diaphragm is arranged on one end of the pneumatic chamber. A lifting part(160) controls a gap between the tray and the stage.
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申请公布号 |
KR20120035784(A) |
申请公布日期 |
2012.04.16 |
申请号 |
KR20100097517 |
申请日期 |
2010.10.06 |
申请人 |
LIGADP CO., LTD. |
发明人 |
SON, HYOUNG KYU;CHOI, EUN YOUL;KANG, CHAN HO |
分类号 |
H01L51/56 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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