SEMICONDUCTOR DEVICE HAVING GLUE LAYER AND SUPPORTER
摘要
PURPOSE: A semiconductor device is provided to prevent the collapse of lower electrodes by providing a supporting structure between the lower electrodes. CONSTITUTION: A supporting structure includes a supporter(33S) and a glue layer(41) between metal patterns. The metal pattern has a vertical length longer than a horizontal length on a substrate. The supporter has band gap energy of 4.5eV or greater. The glue layer is touched with the metal patterns. The supporter and the glue layer are made of different film materials.
申请公布号
KR20120035683(A)
申请公布日期
2012.04.16
申请号
KR20100097361
申请日期
2010.10.06
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, WAN DON;KIM, BEOM SEOK;TAK, YONG SUK;CHO, KYU HO;LEE, SEUNG HWAN;KWON, OH SEONG;CHOI, GEUN KYU