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发明名称
PLASMAQUELLE MIT SEGMENTIERTER MAGNETRON-KATHODE
摘要
申请公布号
AT550454(T)
申请公布日期
2012.04.15
申请号
AT20040810268T
申请日期
2004.11.04
申请人
ZOND, INC.
发明人
CHISTYAKOV, ROMAN
分类号
C23C14/00;C23C14/34;C23C14/35;C23C14/54;H01J37/34
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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