Byte av funktionsfrekvens i ett LBAW-filter

摘要

In laterally coupled BAW (LBAW) filters, the center frequency is generally determined by the thin film stack thickness. However, it is possible to affect the operation frequency with the lateral dimensions of electrodes (13), e.g., electrode width (12). Therefore, it is possible to manufacture LBAW components on a single wafer having a general thickness with electrodes (13) of a different width (12). When the different electode widths (12) are based on the specific local thickness of each element and/or the desired center frequency it is possible to manufacture components on a single wafer with accurate and optionally predetermined different center frequencies.