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发明名称
VERBESSERTE SPUTTER-TARGET-NUTZUNG
摘要
申请公布号
AT553495(T)
申请公布日期
2012.04.15
申请号
AT20060817742T
申请日期
2006.12.12
申请人
OERLIKON SOLAR AG, TRUEBBACH
发明人
SCHNEIDER, STEFAN;MUELLER, MARCEL;VYSKOCIL, JIRI;WAGNER, ISRAEL
分类号
H01J37/34;C23C14/34;C23C14/35
主分类号
H01J37/34
代理机构
代理人
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地址
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