FLUIDIZED BED REACTOR FOR PRODUCING TRICHLOROSILANE

摘要

PURPOSE: A fluidized bed reactor for manufacturing trichlorosilane is provided to improve the productivity of silicon and to save costs required for manufacturing the silicon by preventing the clogging phenomenon of the reactor. CONSTITUTION: A fluidized bed reactor for manufacturing trichlorosilane includes a pipe part(2) and an expansion tank part(3). Metal silicon powder and hydrogen chloride gas are reacted in the pipe part. The expansion tank part is in connection with the upper side of the pipe part. The diameter of the expansion tank part is larger than the diameter of the pipe part. At least one baffles(9) are installed on the inner wall of the expansion tank part. A collecting hole is formed at the joint part of the baffles and the expansion tank part. The baffles are upwardly slanted.