DRIVING PART OF TRACK FOR SUBSTRATE CONVEYING APPARATUS AND METHOD OF ADJUST TENSION OF TIMING BELT USING THE SAME

摘要

PURPOSE: A driving unit of a track for transferring a substrate and a method for controlling tension of a timing belt are provided to automatically control the tension of the timing belt by changing a position of a pulley using tension of a spring. CONSTITUTION: Sawteeth are formed on the outer side of a first pulley and a second pulley. A timing belt(210) has a groove(210a) engaged with the sawteeth. The timing belt is wound around the first pulley and the second pulley. A fixed bracket(231) is fixed to a main frame(200). A spring(235) connects the fixed bracket to the first pulley.