Apparatus for analyzing samples with ultralow temperature concentration modules

摘要

PURPOSE: A sample analysis apparatus is provided to analyze the concentration of each diluted reference gas obtained by mixing reference gas and dilute gas in various mixture ratios. CONSTITUTION: A sample analysis apparatus(1) includes a super low temperature concentrating system and a diluting device(50) supplying reference gas after diluting. The diluting device includes the following a reference gas supply line(51) and a diluted gas supply line(53); a flow speed controller(42) controlling the flowing amount and speed of each gas; a mixing chamber(56) for mixing the reference gas and diluted gas; and a heating block(55) for heating each gas flowing into the mixing chamber.