| 摘要 |
<P>PROBLEM TO BE SOLVED: To quickly micromachine an object with high accuracy. <P>SOLUTION: A machining head 4 of the micromachining apparatus includes a diffraction grating type spatial light modulation device 41 having a plurality of movable ribbons 413a and fixed ribbons arranged alternately on a substrate 411, and a plurality of cutting blades 42 projecting from the plurality of movable ribbons 413a of the spatial light modulation device 41 toward a holding part 3. In the machining head 4, by rising/lowering of the plurality of moving ribbons 413a, the plurality of cutting blades 42 individually come in contact with and separate from a cutting face 91 of the object 9, and with the cutting blades 42 in contact with the cutting face 91, by the object 9 being moved, micromachining is performed. In the micromachining apparatus, by controlling rising/lowering of the movable ribbons 413a with high accuracy, micromachining of the object 9 can be performed quickly and with high accuracy. <P>COPYRIGHT: (C)2012,JPO&INPIT |
