| 摘要 |
PURPOSE: A method for obtaining data of a substrate processing device and a substrate for a sensor are provided to obtain data for a short time by transferring the substrate for the sensor between modules using a substrate transfer device. CONSTITUTION: A substrate for a sensor is transferred to a module by moving a holding support member forward. A magnetic field is formed by supplying power to a transmission coil(42) which moves with a base. The transmission coil and a reception coil(63) are resonant in the magnetic field. Power is supplied from the transmission coil to the reception coil. Data about the module is obtained by the sensor. |
