发明名称 CHARGED PARTICLE BEAM DEVICE AND IMAGE DATA RETRIEVAL METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a charged particle beam device and an image data retrieval method, by which a user can quickly retrieve desired image data. <P>SOLUTION: The device comprises an operation log data creation part for storing an operation history of a user and creating operation log data; an extraction log data creation part for extracting only an item relating to an imaging condition from the operation log data to create extraction log data; an importance parameter setting part for setting an importance parameter for predetermined weighting to each item contained in the extraction log data; an importance calculation part for calculating an importance of the imaging data based on the extraction log data and the importance parameter and storing the imaging data provided with the importance in a storing device; and a retrieval part for retrieving a proper imaging data from the image data provided with the importance and stored in the storing device using at least the imaging condition of the imaging data or the importance inputted by the user as retrieval conditions. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012074187(A) 申请公布日期 2012.04.12
申请号 JP20100216911 申请日期 2010.09.28
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 MAKINO YUTAKA
分类号 H01J37/22 主分类号 H01J37/22
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