发明名称 |
ION BEAM IRRADIATION DEVICE AND METHOD FOR SUPPRESSING ION BEAM DIVERGENCE |
摘要 |
To improve an efficiency of utilizing electrons and efficiently suppress an ion beam spread by a space charge effect while eliminating a need for a special magnetic pole structure by effectively using a space in the vicinity of a magnet, there are provided an ion source, a collimating magnet and a plurality of electron sources, wherein the electron sources are arranged in a magnetic field gradient region formed on an ion beam upstream side or ion beam downstream side of the collimating magnet and arranged outside a region passed by the ion beam, and an irradiation direction of the electrons is directed to supply the electrons to the magnetic field gradient region. |
申请公布号 |
US2012085918(A1) |
申请公布日期 |
2012.04.12 |
申请号 |
US201013377253 |
申请日期 |
2010.04.27 |
申请人 |
NICOLAESCU DAN;SAKAI SHIGEKI;ISHIKAWA JUNZO;GOTOH YASUHITO;KYOTO UNIVERSITY;NISSIN ION EQUIPMENT CO., LTD. |
发明人 |
NICOLAESCU DAN;SAKAI SHIGEKI;ISHIKAWA JUNZO;GOTOH YASUHITO |
分类号 |
H01J3/26;H01J3/20 |
主分类号 |
H01J3/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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