发明名称 CRYSTAL GROWTH APPARATUS AND MANUFACTURING METHOD OF GROUP III NITRIDE CRYSTAL
摘要 A crystal growth apparatus comprises a reaction vessel holding a melt mixture containing an alkali metal and a group III metal, a gas supplying apparatus supplying a nitrogen source gas to a vessel space exposed to the melt mixture inside the reaction vessel, a heating unit heating the melt mixture to a crystal growth temperature, and a support unit supporting a seed crystal of a group III nitride crystal inside the melt mixture.
申请公布号 US2012085279(A1) 申请公布日期 2012.04.12
申请号 US201113313359 申请日期 2011.12.07
申请人 SARAYAMA SEIJI;IWATA HIROKAZU;FUSE AKIHIRO 发明人 SARAYAMA SEIJI;IWATA HIROKAZU;FUSE AKIHIRO
分类号 C30B9/00 主分类号 C30B9/00
代理机构 代理人
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