| 摘要 |
PURPOSE: An organic thin film deposition device is provided to control the thickness of organic layers formed on a substrate. CONSTITUTION: An organic thin film deposition device is installed within a vacuum chamber and comprises an evaporation source part(2), a guide tube(3), and a distribution pipe(4). The evaporation source part evaporates organic compound. The guide tube connects to the inside of the evaporation source part. The distribution pipe ejects the organic vapor, provided through the guide tube, to the substrate through jet holes(4a). Provided is one or more deposition rate measurement holes or tubes on one among the evaporation source part, the guide tube, and the distribution pipe.
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