| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hard film having excellent abrasion resistance achieved by improving hardness, oxidation resistance, and toughness; and to provide a hard film coated tool that is formed by using the hard film. <P>SOLUTION: The hard film, which is coated on the surface of a tool, has a composition of Al<SB POS="POST">1-a-b-c</SB>Si<SB POS="POST">a</SB>Mg<SB POS="POST">b</SB>M<SB POS="POST">c</SB>(B<SB POS="POST">x</SB>C<SB POS="POST">y</SB>N<SB POS="POST">z</SB>), wherein M is at least one element selected from Nb, Zr, Cr, Cu, and Y, and following formulas are satisfied when a, b, c, x, y, and z are atomic ratios: 0≤a≤0.35; 0≤b≤0.2; 0.03≤a+b≤0.5; 0≤c≤0.1; 0.9≤Al+Si+Mg by atomic ratio; 0≤x≤0.2; 0≤y≤0.4; 0.5≤z≤1; and x+y+z=1. The hard film coated tool is formed by using the hard film disclosed above. <P>COPYRIGHT: (C)2012,JPO&INPIT |
