发明名称 METHOD AND APPARATUS FOR ROUTING DISPATCHING AND ROUTING RETICLES
摘要 A method includes generating a reticle transport job using a computing device. The reticle job identifies a selected reticle. A reticle pod available for transporting the reticle is autonomously identified using the computing device. The reticle transport job is updated suing the computing device with an identifier of the reticle pod.
申请公布号 US2012089245(A1) 申请公布日期 2012.04.12
申请号 US20100900085 申请日期 2010.10.07
申请人 ADHIKARI DIWASKAR;GOSS RAYMOND G. 发明人 ADHIKARI DIWASKAR;GOSS RAYMOND G.
分类号 G06F17/00 主分类号 G06F17/00
代理机构 代理人
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