发明名称 PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR FORMING CURED FILM, CURED FILM, ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE AND LIQUID CRYSTAL DISPLAY DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition having high sensitivity, excellent transparency in a cured film and a wide development latitude. <P>SOLUTION: The photosensitive resin composition contains: (component A) an oxime sulfonate compound expressed by formula (1); (component B) a (meth)acrylic copolymer containing a structural unit that has a carboxyl group protected with an acid-decomposable group; and (component C) a solvent. In the formula, R<SP POS="POST">1</SP>represents an alkyl group, an aryl group or a heteroaryl group; Ar represents an o-arylene group or an o-heteroaryl group; X represents O or S; and n represents 1 or 2. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012073609(A) 申请公布日期 2012.04.12
申请号 JP20110187894 申请日期 2011.08.30
申请人 FUJIFILM CORP 发明人 SAKIDA KYOHEI;KIKUCHI WATARU;YUMOTO MASATOSHI;HIKITA MASANORI
分类号 G03F7/004;C08F20/00;G03F7/039;H01L21/027;H01L51/50;H05B33/10;H05B33/12;H05B33/22 主分类号 G03F7/004
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