| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for measuring a position and shape of a pattern formed on a sheet that allows simplification of correction when measuring a position and shape. <P>SOLUTION: The device includes a sheet on which the pattern is formed, a camera holding mechanism arranged perpendicularly crossing a conveyance direction of the sheet, a camera movably arranged along a longitudinal direction of the camera holding mechanism, and an image processing computer for processing an image photographed by the camera. When the correction is made, the correction is carried out based on a coated pattern and a photographed image of a correction reference body. <P>COPYRIGHT: (C)2012,JPO&INPIT |
