| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser device which can supply a pulse group having a high output, high repetition and high reproducibility, and to provide a laser processing device using it. <P>SOLUTION: The laser device comprises a laser medium G moving in the -Z direction, an optical resonator having an oscillation region 10 for oscillating pulse laser light, an optical amplifier having an optical axis in the X direction and an amplification region 4 for amplifying the pulse laser light from the optical resonator, a Q switch element 21 which changes the Q value of the optical resonator periodically, and a control unit 33 which stops amplification operation of the optical amplifier for a predetermined time width Tn at a predetermined period Ti. <P>COPYRIGHT: (C)2012,JPO&INPIT |
