| 摘要 |
A surface state inspection apparatus has a lighting device that irradiates an inspection target placed on a stage with light, an imaging device that images the inspection target, and a detection device that detects a surface defect of the inspection target by analyzing a first inspection image obtained by the imaging device. The lighting device is a surface light source that includes a light emission region having a predetermined size and, in the lighting device, portions of light emitted from positions in the light emission region differ from each other in a spectral distribution. The detection device detects a portion in which a hue is different from that of its surrounding portion in the inspection target surface as a flaw. The detection device detects a portion in which the hue is substantially equal to that of its surrounding portion while brightness is different from that of its surrounding portion as a stain.
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