发明名称 |
INTEGRATED MEMS DEVICE AND METHOD OF USE |
摘要 |
An integrated MEMS device is disclosed. The system comprises a MEMS resonator; and a MEMS device coupled to a MEMS resonator. The MEMS resonator and MEMS device are fabricated on a common substrate so that certain characteristics of the MEM resonator and MEMS device track each other as operating conditions vary. |
申请公布号 |
US2012086446(A1) |
申请公布日期 |
2012.04.12 |
申请号 |
US20100979960 |
申请日期 |
2010.12.28 |
申请人 |
SHAEFFER DEREK;CAGDASER BARIS;LO CHIUNG C.;SEEGER JOSEPH;INVENSENSE, INC. |
发明人 |
SHAEFFER DEREK;CAGDASER BARIS;LO CHIUNG C.;SEEGER JOSEPH |
分类号 |
G01R33/02;H03H9/02;H05K3/30 |
主分类号 |
G01R33/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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