| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a holder, capable of preventing breakage of an object to be polished and a frame member, and capable of performing stable polishing working. <P>SOLUTION: The holder 10 includes the frame member 5 and a polyurethane sheet 2. The frame member 5 is composed of a foam resin part 5a, wherein a through-hole 6 for inserting the object to be polished is formed. The foam resin part 5a, in which many bubbles 53 are formed, has elasticity. The frame member 5 is provided with a hard resin part 5b so as to cover a surface S at the side of the through-hole 6. The hard resin part 5b has higher hardness than the foam resin part 5a, and has flexibility. The frame member 5 exhibits cushion properties at the foam resin part 5a, and maintains the rigidity at the hard resin part 5b, and plastic deformation of the entire frame member 5 is prevented. <P>COPYRIGHT: (C)2012,JPO&INPIT |
