VAPOR DEPOSITION MATERIAL FOR FORMING THIN FILM, THIN FILM SHEET HAVING THE THIN FILM, AND LAMINATED SHEET

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition material suitable for forming a thin film excellent in transparency and gas-barrier property, and to provide a thin film sheet having the thin film, and a laminated sheet.

SOLUTION: The vapor deposition material is prepared by mixing first oxide powder and second oxide powder, wherein; the first oxide powder is Y2O3powder; the first oxide powder has ≥98% purity of the first oxide; the second oxide powder is one kind of powder or two kinds of mixture powder selected from a group consisting of ZnO, MgO and CaO; the second oxide powder has ≥98% purity of the second oxide; the vapor deposition material comprises pellets containing first oxide particles and second oxide particles; the ratio of the first oxide to the second oxide in the vapor deposition material is (5 to 85):(95 to 15); and the pellets have a basicity of ≥0.1.

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