SHAPE MEASURING APPARATUS AND SHAPE MEASURING METHOD

摘要

The invention provides a technique of accurately measuring a three-dimensional shape and a spatial position of a mirror surface object. A camera takes an image of a measuring target while a lighting device irradiates the measuring target with light, thereby obtaining an image for shape measurement. An orientation of a normal on a measuring target surface is calculated from the image for shape measurement, and the three-dimensional shape of the surface is restored from the calculation result. The camera takes the image of the measuring target while a projector projects a fringe pattern to the measuring target, thereby obtaining an image for ranging. Height information on the measuring target surface is obtained by analyzing the obtained image for ranging. The three-dimensional shape and spatial position of the measuring target are determined by combining the three-dimensional shape restored by the normal calculation and the height information obtained by the ranging.