发明名称 PHOTOSENSITIVE RESIN COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition enabling formation of a pattern with excellent mechanical characteristics. <P>SOLUTION: The photosensitive resin composition contains the following components (A), (B), (C), (D) and (E). They are: (A) a resin; (B) a polymerizable compound; (C) a polymerization initiator; (D) a compound having two or more of at least one kind of group selected from the group consisting of active methylene groups and active methine groups, and having a molecular weight of less than 3000; and (E) a solvent. An acetoacetyl group is preferable as the at least one kind of group selected from the group consisting of active methylene groups and active methine groups. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012073604(A) 申请公布日期 2012.04.12
申请号 JP20110184720 申请日期 2011.08.26
申请人 SUMITOMO CHEMICAL CO LTD 发明人 INOUE KATSUJI
分类号 G03F7/004;C08F2/44;C08F2/48;C08F265/04;G02F1/1339;G03F7/031;G03F7/033;H01L21/027 主分类号 G03F7/004
代理机构 代理人
主权项
地址