OPTICAL SENSOR AND OPTICAL SENSOR ARRAY

摘要

PROBLEM TO BE SOLVED: To amplify and output a photoelectric current resulting from photoconduction by a diode formed at a connection plane of an n-type amorphous silicon film of a low resistance and a thick amorphous silicon film by disposing the n-type amorphous silicon film between the thick amorphous silicon film and an upper electrode.

SOLUTION: The optical sensor comprises: a lower electrode composed of a metal film; an amorphous silicon film provided on the lower electrode; an n-type amorphous silicon film provided on the amorphous silicon film; an upper electrode provided on the n-type amorphous silicon film, and accepting input of a first reference voltage; a capacitive element connected between the lower electrode and a second reference voltage; a switch circuit which inputs a first power source voltage to the lower electrode when staying in ON state, and brings the lower electrode to a floating condition when staying in OFF state; and a detection circuit which detects a change in voltage of the lower electrode after the amorphous silicon film has been irradiated with light for a predetermined period of time in the condition of the switch circuit staying in ON state.

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