| 摘要 |
<P>PROBLEM TO BE SOLVED: To downsize a pressure detecting package equipped with a temperature detecting function. <P>SOLUTION: A pressure detecting package 10 comprises an insulation substrate 1, a static side electrode pattern 11 formed on an upper surface of the insulation substrate 1, a frame-shaped portion 2 provided so as to surround the static side electrode pattern 11 on the insulation substrate 1, a diaphragm 3 provided on the frame-shaped portion 2 so as to form a sealing space between the insulation substrate 1 and the frame-shaped portion 2, and a moving side electrode pattern 31 provided on a lower surface of the diaphragm 3 and forming a capacitance between the static side electrode pattern 11 and the moving side electrode pattern 31. The moving side electrode pattern 31 changes a resistance value according to temperature change, and is provided with a wiring conductor 7 for measuring the resistance value, which is connected to the moving side electrode pattern 31. An area of a cross section vertical to a current flowing direction in the moving side electrode pattern 31 is smaller than an area of a cross section vertical to a current flowing direction in the wiring conductor 7. <P>COPYRIGHT: (C)2012,JPO&INPIT |
