SILICON TITANIUM OXIDE COATING, COATED ARTICLE INCLUDING SILICON TITANIUM OXIDE COATING, AND METHOD OF MAKING THE SAME

摘要

Certain example embodiments relate to a layer of or including Ti1-xSixOy and/or a method of making the same. In certain example embodiments, the Ti1-xSixOy -based layer may be substoichiometric with respect to oxygen. In certain example embodiments of this invention, the layer may include Ti1-xSixOy where x is from about 0.05 to 0.95 (more preferably from about 0.1 to 0.9; and even more preferably from about 0.2 to 0.8. and possibly from about 0.5 to 0.8) and y is from about 0.2 to 2 (more preferably from about 1 to 2. and even more preferably from about 1.5 to 2, and possibly from about 1.9 to 2). The layer may have an index of refraction of from about 1.6 to 1.9. The layer may also be used with a transparent conductive oxide in a transparent conductive coatins.