| 发明名称 |
MIRROR, MIRROR DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS |
| 摘要 |
A mirror includes a mirror base provided with a flow channel through which a heat medium passes for cooling the mirror. The flow channel includes a buffer tank, portion for adjusting a flow rate of the heat medium in the flow channel. A reflective film is provided on the mirror base. |
| 申请公布号 |
WO2012046133(A2) |
申请公布日期 |
2012.04.12 |
| 申请号 |
WO2011IB02365 |
申请日期 |
2011.10.07 |
| 申请人 |
GIGAPHOTON INC.;KAMEDA, HIDENOBU;WAKABAYASHI, OSAMU |
发明人 |
KAMEDA, HIDENOBU;WAKABAYASHI, OSAMU |
| 分类号 |
G02B7/18 |
主分类号 |
G02B7/18 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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