| 发明名称 |
IN-SITU VHF VOLTAGE/CURRENT SENSORS FOR A PLASMA REACTOR |
| 摘要 |
An RE voltage probe is adapted to have a long coaxial cable to permit a measuring device to be connected remotely from the probe without distorting the voltage measurement. An RF current probe is encapsulated in a conductive housing to permit its placement inside a plasma reactor chamber. |
| 申请公布号 |
US2012086464(A1) |
申请公布日期 |
2012.04.12 |
| 申请号 |
US201113052280 |
申请日期 |
2011.03.21 |
| 申请人 |
HANAWA HIROJI;KOBAYASHI SATORU;RAMASWAMY KARTIK;RAUF SHAHID;APPLIED MATERIALS, INC. |
发明人 |
HANAWA HIROJI;KOBAYASHI SATORU;RAMASWAMY KARTIK;RAUF SHAHID |
| 分类号 |
G01R27/04 |
主分类号 |
G01R27/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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