| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fine particle measuring device which eliminates the influence of a light noise due to laser output fluctuation such as a mode hop of a laser light source 1a, Rayleigh scattered light emitted from air molecules or the like, and light reflection on the internal wall surface of an optical system housing, and the like, and can accurately measure fine particles. <P>SOLUTION: In the fine particle measuring device which includes a light noise light-receiving optical system (3) for detecting a light noise such as a laser noise due to output fluctuation of a laser light source (1a), Rayleigh scattered light emitted from air molecules, and stray light (11) reflected on the internal wall surface of an optical system housing (6), a signal processing section (12) takes a difference between a scattered light light-receiving signal and a light noise light-receiving signal, and thereby removes a light noise component included in the scattered light light-receiving signal. <P>COPYRIGHT: (C)2012,JPO&INPIT |
