| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micro-scanner able to restrain malfunction and damage due to vibration and impact without causing an increase in power consumption and decrease in deflection angle and scanning performance. <P>SOLUTION: The micro-scanner OS includes: a movable part 2; a fixed frame 1 surrounding the movable part 2; a main shaft part 3 supporting the movable part 2 such that the movable part 2 is able to swing; and a displacement part 4 for displacing the movable part 2 or main shaft part 3; and a regulation part 60 for regulating displacement in the Z direction of the displacement part 4. <P>COPYRIGHT: (C)2012,JPO&INPIT |
