发明名称 METHOD FOR CRYSTALLIZING AMORPHOUS SILICON USING SILC AND METHOD FOR FABRICATING POLYCRYSTALLINE SILICON THIN FILM TRANSISTOR USING THE SAME
摘要 PURPOSE: A method for crystallizing an amorphous silicon using SILC and a method for fabricating a polycrystalline silicon thin film transistor using the same are provided to improve productivity by performing a compressing process of contracting an insulating substrate. CONSTITUTION: A method for crystallizing an amorphous silicon using SILC and a method for fabricating a polycrystalline silicon thin film transistor using the same are comprised of the steps: forming an amorphous silicon on a transparent insulating substrate(11); crystallizing the amorphous silicon as the poly-crystal silicon while performing the compression process of contracting the insulating substrate; and forming an active layer by patterning amorphous silicon.
申请公布号 KR101135302(B1) 申请公布日期 2012.04.12
申请号 KR20080032636 申请日期 2008.04.08
申请人 发明人
分类号 H01L21/20;H01L21/324 主分类号 H01L21/20
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