| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a catadioptric projection optical system using a liquid immersion method which has a large numerical aperture without enlarging the sizes of constituent optical members. <P>SOLUTION: A catadioptric projection optical system PL1 forms an image of a first surface R1 on a second surface. The catadioptric projection optical system PL1 includes at least six mirrors M1-M6 and comprises a first imaging optical system G1 which forms a first intermediate image and a second intermediate image of the first surface R1, and a second imaging optical system G2 which relays the second intermediate image onto the second surface. <P>COPYRIGHT: (C)2012,JPO&INPIT |
