Flow sensor for determining mass flow in automobile industry, has trim structures divided into two connected portions, where portions of trim structure are symmetrical to midpoint or symmetry axis that is arranged around sensor structure

摘要

The sensor (1) has a heating element (3) and a temperature sensor (2) applied on a common substrate (4). A resistor structure (21) comprises a sensor structure (22) arranged centrally to trim structures (23, 24). The trim structures are divided into two connected portions, where the portions of the trim structures are symmetrical to a midpoint or a symmetry axis that is arranged around the sensor structure. The heating element and the temperature sensor are applied in thin-film technology or thick film technique. An independent claim is also included for a method for creating an electrical resistor structure.